Analysis and Measurement of Residual Stress in Bridge Membrane MEMS Relays
نویسندگان
چکیده
منابع مشابه
Fabrication and analysis of MEMS Test Structures for Residual Stress measurement
A set of test structures for in situ stress measurement is presented. The test structures were realized by means of surface micromachining, adopting photoresist as sacrificial layer and electroplated gold as structural layer. Initially array of buckling type test structures cantilevers, fixedfixed beams, guckel rings and diamond were used to find out critical buckling beam. Later on rotational ...
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ژورنال
عنوان ژورنال: Journal of Electronic Materials
سال: 2017
ISSN: 0361-5235,1543-186X
DOI: 10.1007/s11664-017-5323-1